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| Predicate | Object |
|---|---|
| rdf:type | |
| lifeskim:mentions | |
| pubmed:issue |
1-2
|
| pubmed:dateCreated |
1993-11-12
|
| pubmed:abstractText |
In order to fabricate microsensors, a micromachining, microfabrication technique based on LSI technologies has been used. In this paper, useful micromachining techniques are described. Examples of integrated microsensors, such as a pressure sensor including a readout circuit and a multisensor cell for blood gas analysis, are introduced. Microflow control devices, such as microvalve and a micropump for integrated chemical analysis systems, are also described.
|
| pubmed:language |
eng
|
| pubmed:journal | |
| pubmed:citationSubset |
IM
|
| pubmed:status |
MEDLINE
|
| pubmed:issn |
0273-2289
|
| pubmed:author | |
| pubmed:issnType |
Print
|
| pubmed:volume |
41
|
| pubmed:owner |
NLM
|
| pubmed:authorsComplete |
Y
|
| pubmed:pagination |
21-34
|
| pubmed:dateRevised |
2004-11-17
|
| pubmed:meshHeading | |
| pubmed:articleTitle |
Microfabrication and microsensors.
|
| pubmed:affiliation |
Department of Mechatronics & Precision Engineering, Tohoku University, Sendai, Japan.
|
| pubmed:publicationType |
Journal Article
|