Source:http://linkedlifedata.com/resource/umls/id/C1513271
MSH: Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.,NCI: The processing techniques, such as deposition, etching, and patterning, that are utilized to produce miniaturized structures and devices with feature sizes and resolution in the micron domain. Uses a combination of micromachining and integrated circuit fabrication technology. (from U. Louisville course description)