Linked Life Data

12469733

Source:http://linkedlifedata.com/resource/pubmed/id/12469733

Statements in which the resource exists as a subject.
PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
12
pubmed:dateCreated
2002-12-9
pubmed:abstractText
Characterization of gratings with small period-to-wavelength ratios is difficult to perform but is very helpful in improving the fabrication process. We experimentally tested an inverse-scattering method using a neural network on silicon etched gratings. We also characterized the gratings by using two popular microscopic methods. The validity of each method was determined by comparing measured diffracted intensities with calculated ones obtained from measured profiles. An estimation of accuracy and repeatability was deduced from a scan along a grating sample. This method was thus well validated for nondestructive and noninvasive measurements under experimental conditions that were close conditions of actual usage. This method is easy to implement and requires the measurement of only a few diffracted intensities.
pubmed:language
eng
pubmed:journal
pubmed:status
PubMed-not-MEDLINE
pubmed:month
Dec
pubmed:issn
1084-7529
pubmed:author
pubmed:issnType
Print
pubmed:volume
19
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
2394-402
pubmed:dateRevised
2003-11-4
pubmed:year
2002
pubmed:articleTitle
Experimental characterization of subwavelength diffraction gratings by an inverse-scattering neural method.
pubmed:affiliation
Laboratoire Traitement du Signal et Instrumentation, Unité Mixte de Recherche, Centre National de la Recherche Scientifique 5516, 23, rue du Docteur Paul Michelon, 42023 Saint-Etienne Cedex 2, France. stephane.robert@univ-st-etienne.fr
pubmed:publicationType
Journal Article