Linked Life Data

11339537

Source:http://linkedlifedata.com/resource/pubmed/id/11339537

Statements in which the resource exists as a subject.
PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
1
pubmed:dateCreated
2001-5-7
pubmed:abstractText
Thickness determination of Ta2O5 thin films, deposited on the glass substrates and metallic indium and gold thin films on both glass and aluminum substrates, were performed by neutron activation analysis. Thickness determination of these thin films were made by comparing gamma-rays emitted from the radio-isotopes in the thin film with the substrate material followed by the neutron irradiations. The method led to determination of the film thicknesses without using any standard sample. A complementary optical transmission measurement was also applied on multi-layered Ta2O5 thin films for determining the individual layer densities.
pubmed:language
eng
pubmed:journal
pubmed:status
PubMed-not-MEDLINE
pubmed:month
Jul
pubmed:issn
0969-8043
pubmed:author
pubmed:issnType
Print
pubmed:volume
55
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
9-12
pubmed:dateRevised
2003-10-31
pubmed:year
2001
pubmed:articleTitle
Thin film thickness determination with neutron activation analysis.
pubmed:affiliation
Department of Physics, Istanbul Technical University, Maslak/Istanbul, Turkey. hguven@itu.edu.tr
pubmed:publicationType
Journal Article