Source:http://linkedlifedata.com/resource/pubmed/id/10646272
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Predicate | Object |
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rdf:type | |
lifeskim:mentions | |
pubmed:issue |
1
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pubmed:dateCreated |
2000-2-8
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pubmed:abstractText |
We describe a novel capacitive position sensor using micromachining to achieve high sensitivity and large range of motion. These sensors require a new theoretical framework to describe and optimize their performance. Employing a complete description of the electrical fields, the sensor should deviate from the standard geometries used for capacitive sensors. By this optimization, the sensor gains a twofold increase in sensitivity. Results on a PC board 10x model imply that the micromachined sensor should achieve a sensitivity of less than 10 nm over 500-micron range of travel. Some bioengineering applications are addressed, including positioning of micromirrors for laser surgery and dose control for implantable drug delivery systems.
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pubmed:language |
eng
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pubmed:journal | |
pubmed:citationSubset |
IM
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pubmed:status |
MEDLINE
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pubmed:month |
Jan
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pubmed:issn |
0018-9294
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pubmed:author | |
pubmed:issnType |
Print
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pubmed:volume |
47
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pubmed:owner |
NLM
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pubmed:authorsComplete |
Y
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pubmed:pagination |
8-11
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pubmed:dateRevised |
2009-11-11
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pubmed:meshHeading | |
pubmed:year |
2000
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pubmed:articleTitle |
Perspectives on MEMS in bioengineering: a novel capacitive position microsensor.
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pubmed:affiliation |
Department of Bioengineering, Politecnico di Milano, Italy. pedrocchi@biomed.polimi.it
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pubmed:publicationType |
Journal Article
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