Linked Life Data

21460956

Source:http://linkedlifedata.com/resource/pubmed/id/21460956

Statements in which the resource exists as a subject.
PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
9
pubmed:dateCreated
2011-4-4
pubmed:abstractText
Different HfO2 monolayers under different deposition conditions, such as substrate temperature and oxygen partial pressure, were prepared from metal hafnium using the reactive electron beam evaporation method. X-ray diffraction was applied to determine the crystalline phase of these films, the surface morphology of the samples was examined by atomic force microscopy, and the optical properties were analyzed using a spectrophotometer and the surface thermal lens technique. The relationship between substrate temperature and film characteristic was investigated, and the correlation between the observed film properties and the laser damage threshold was also discussed.
pubmed:language
eng
pubmed:journal
pubmed:status
PubMed-not-MEDLINE
pubmed:month
Mar
pubmed:issn
1539-4522
pubmed:author
pubmed:issnType
Electronic
pubmed:day
20
pubmed:volume
50
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
C309-15
pubmed:year
2011
pubmed:articleTitle
Effects of substrate temperatures on the structure and properties of hafnium dioxide films.
pubmed:affiliation
Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai, China.
pubmed:publicationType
Journal Article