21445413

Source:http://linkedlifedata.com/resource/pubmed/id/21445413

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Predicate	Object
rdf:type	pubmed:Citation
lifeskim:mentions	umls-concept:C0137758, umls-concept:C0205148
pubmed:issue	9
pubmed:dateCreated	2011-4-12
pubmed:abstractText	We present a method for high fidelity lithographic patterning on polydimethylsiloxane (PDMS) surfaces employing traditional cleanroom equipment and commercially available materials that overcomes previous problems in PDMS processing. To illustrate this method, an electrostatically actuated microfluidic pump and rectangular diffraction gratings were fabricated on PDMS.
pubmed:language	eng
pubmed:journal	http://linkedlifedata.com/resource/pubmed/journal/101128948
pubmed:status	PubMed-not-MEDLINE
pubmed:month	May
pubmed:issn	1473-0189
pubmed:author	pubmed-author:ClarkeDavid RDR, pubmed-author:DieboldRoger MRM
pubmed:copyrightInfo	© The Royal Society of Chemistry 2011
pubmed:issnType	Electronic
pubmed:day	7
pubmed:volume	11
pubmed:owner	NLM
pubmed:authorsComplete	Y
pubmed:pagination	1694-7
pubmed:year	2011
pubmed:articleTitle	Lithographic patterning on polydimethylsiloxane surfaces using polydimethylglutarimide.
pubmed:affiliation	School of Engineering and Applied Sciences, Harvard University, 29 Oxford St, Cambridge, MA 02138, USA. rdiebold@seas.harvard.edu
pubmed:publicationType	Journal Article