Linked Life Data

21263625

Source:http://linkedlifedata.com/resource/pubmed/id/21263625

Statements in which the resource exists as a subject.
PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
2
pubmed:dateCreated
2011-1-25
pubmed:abstractText
Smooth sidewall silicon micro-ring molds have been fabricated using resist reflow and thermal oxidation method. High Q factor polymer micro-ring resonators have been fabricated using these molds. Quality factors as high as 10(5) have been measured at telecommunication wavelength range. By carefully examining the different loss mechanisms in polymer micro-ring, we find that the surface scattering loss can be as low as 0.23 dB/cm, much smaller than the absorption loss of the polystyrene polymer used in our devices. When used as an ultrasound detector such a high Q polymer micro-ring device can achieve an acoustic sensitivity around 36.3 mV/kPa with 240 ?W operating power. A noise equivalent pressure (NEP) is around 88 Pa over a bandwidth range of 1-75 MHz. We have improved the NEP by a factor of 3 compared to our previous best result.
pubmed:grant
pubmed:language
eng
pubmed:journal
pubmed:citationSubset
IM
pubmed:chemical
pubmed:status
MEDLINE
pubmed:month
Jan
pubmed:issn
1094-4087
pubmed:author
pubmed:issnType
Electronic
pubmed:day
17
pubmed:volume
19
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
861-9
pubmed:meshHeading
pubmed:year
2011
pubmed:articleTitle
Fabrication and characterization of high Q polymer micro-ring resonator and its application as a sensitive ultrasonic detector.
pubmed:affiliation
Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109, USA.
pubmed:publicationType
Journal Article, Research Support, N.I.H., Extramural