Source:http://linkedlifedata.com/resource/pubmed/id/21196977
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rdf:type | |
lifeskim:mentions | |
pubmed:issue |
26
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pubmed:dateCreated |
2011-1-3
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pubmed:abstractText |
We report the first demonstration of Si microresonators (MRs) fabricated via substrate transfer on a silica waveguide (WG) wafer. Specifically, these Si microdisks were fabricated on a layer of Si (0.16-0.2 ?m thick) that was directly-bonded on a silica waveguide wafer. We measured the throughput and drop spectrum of these microdisks when coupled to bonded silica waveguides, and observed loaded quality-factors (Qs) of ?10(4). We modeled, in addition, the dispersion of whispering gallery modes in these microdisks to show phase-matched coupling with an incident silica waveguide or fiber-taper. Using the measured extinction ratio and loaded-Q, we evaluated, in addition, the coupling coefficient between the incident waveguide/taper and Si MR.
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pubmed:language |
eng
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pubmed:journal | |
pubmed:citationSubset |
IM
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pubmed:chemical | |
pubmed:status |
MEDLINE
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pubmed:month |
Dec
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pubmed:issn |
1094-4087
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pubmed:author | |
pubmed:issnType |
Electronic
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pubmed:day |
20
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pubmed:volume |
18
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pubmed:owner |
NLM
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pubmed:authorsComplete |
Y
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pubmed:pagination |
27004-15
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pubmed:meshHeading |
pubmed-meshheading:21196977-Computer-Aided Design,
pubmed-meshheading:21196977-Equipment Design,
pubmed-meshheading:21196977-Equipment Failure Analysis,
pubmed-meshheading:21196977-Fiber Optic Technology,
pubmed-meshheading:21196977-Miniaturization,
pubmed-meshheading:21196977-Models, Theoretical,
pubmed-meshheading:21196977-Refractometry,
pubmed-meshheading:21196977-Silicon
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pubmed:year |
2010
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pubmed:articleTitle |
High-Q Si microresonators formed by substrate transfer on silica waveguide wafers.
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pubmed:affiliation |
HRL Laboratories, LLC, Malibu, California, 90265 USA. wwng@hrl.com
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pubmed:publicationType |
Journal Article,
Research Support, U.S. Gov't, Non-P.H.S.
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