| pubmed-article:20889407 | rdf:type | pubmed:Citation | lld:pubmed |
| pubmed-article:20889407 | lifeskim:mentions | umls-concept:C1441758 | lld:lifeskim |
| pubmed-article:20889407 | lifeskim:mentions | umls-concept:C0556962 | lld:lifeskim |
| pubmed-article:20889407 | lifeskim:mentions | umls-concept:C0205132 | lld:lifeskim |
| pubmed-article:20889407 | lifeskim:mentions | umls-concept:C1510941 | lld:lifeskim |
| pubmed-article:20889407 | pubmed:issue | 10 | lld:pubmed |
| pubmed-article:20889407 | pubmed:dateCreated | 2010-10-4 | lld:pubmed |
| pubmed-article:20889407 | pubmed:abstractText | This paper presents the development of a micromachined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 ?m and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT sol-gel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (-6 dB) of 60%. An insertion loss of -41 dB and adjacent element crosstalk of -21 dB were found at the center frequency. | lld:pubmed |
| pubmed-article:20889407 | pubmed:grant | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:20889407 | pubmed:grant | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:20889407 | pubmed:grant | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:20889407 | pubmed:language | eng | lld:pubmed |
| pubmed-article:20889407 | pubmed:journal | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:20889407 | pubmed:citationSubset | IM | lld:pubmed |
| pubmed-article:20889407 | pubmed:chemical | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:20889407 | pubmed:chemical | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:20889407 | pubmed:chemical | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:20889407 | pubmed:chemical | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:20889407 | pubmed:status | MEDLINE | lld:pubmed |
| pubmed-article:20889407 | pubmed:month | Oct | lld:pubmed |
| pubmed-article:20889407 | pubmed:issn | 1525-8955 | lld:pubmed |
| pubmed-article:20889407 | pubmed:author | pubmed-author:ShungKK | lld:pubmed |
| pubmed-article:20889407 | pubmed:author | pubmed-author:ZhouQifaQ | lld:pubmed |
| pubmed-article:20889407 | pubmed:author | pubmed-author:WuDaweiD | lld:pubmed |
| pubmed-article:20889407 | pubmed:author | pubmed-author:LiuChanggengC | lld:pubmed |
| pubmed-article:20889407 | pubmed:author | pubmed-author:DjuthFrankF | lld:pubmed |
| pubmed-article:20889407 | pubmed:author | pubmed-author:ZhuBenpengB | lld:pubmed |
| pubmed-article:20889407 | pubmed:issnType | Electronic | lld:pubmed |
| pubmed-article:20889407 | pubmed:volume | 57 | lld:pubmed |
| pubmed-article:20889407 | pubmed:owner | NLM | lld:pubmed |
| pubmed-article:20889407 | pubmed:authorsComplete | Y | lld:pubmed |
| pubmed-article:20889407 | pubmed:pagination | 2213-20 | lld:pubmed |
| pubmed-article:20889407 | pubmed:dateRevised | 2011-6-10 | lld:pubmed |
| pubmed-article:20889407 | pubmed:meshHeading | pubmed-meshheading:20889407... | lld:pubmed |
| pubmed-article:20889407 | pubmed:meshHeading | pubmed-meshheading:20889407... | lld:pubmed |
| pubmed-article:20889407 | pubmed:meshHeading | pubmed-meshheading:20889407... | lld:pubmed |
| pubmed-article:20889407 | pubmed:meshHeading | pubmed-meshheading:20889407... | lld:pubmed |
| pubmed-article:20889407 | pubmed:meshHeading | pubmed-meshheading:20889407... | lld:pubmed |
| pubmed-article:20889407 | pubmed:meshHeading | pubmed-meshheading:20889407... | lld:pubmed |
| pubmed-article:20889407 | pubmed:meshHeading | pubmed-meshheading:20889407... | lld:pubmed |
| pubmed-article:20889407 | pubmed:meshHeading | pubmed-meshheading:20889407... | lld:pubmed |
| pubmed-article:20889407 | pubmed:year | 2010 | lld:pubmed |
| pubmed-article:20889407 | pubmed:articleTitle | Micro-machined high-frequency (80 MHz) PZT thick film linear arrays. | lld:pubmed |
| pubmed-article:20889407 | pubmed:affiliation | Resource Center for Medical Ultrasonic Transducer Technology, University of Southern California, Los Angeles, CA, USA. | lld:pubmed |
| pubmed-article:20889407 | pubmed:publicationType | Journal Article | lld:pubmed |
| pubmed-article:20889407 | pubmed:publicationType | Research Support, N.I.H., Extramural | lld:pubmed |
