Linked Life Data

20889407

Source:http://linkedlifedata.com/resource/pubmed/id/20889407

Statements in which the resource exists as a subject.
PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
10
pubmed:dateCreated
2010-10-4
pubmed:abstractText
This paper presents the development of a micromachined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 ?m and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT sol-gel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (-6 dB) of 60%. An insertion loss of -41 dB and adjacent element crosstalk of -21 dB were found at the center frequency.
pubmed:grant
pubmed:language
eng
pubmed:journal
pubmed:citationSubset
IM
pubmed:chemical
pubmed:status
MEDLINE
pubmed:month
Oct
pubmed:issn
1525-8955
pubmed:author
pubmed:issnType
Electronic
pubmed:volume
57
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
2213-20
pubmed:dateRevised
2011-6-10
pubmed:meshHeading
pubmed:year
2010
pubmed:articleTitle
Micro-machined high-frequency (80 MHz) PZT thick film linear arrays.
pubmed:affiliation
Resource Center for Medical Ultrasonic Transducer Technology, University of Southern California, Los Angeles, CA, USA.
pubmed:publicationType
Journal Article, Research Support, N.I.H., Extramural