Linked Life Data

20588921

Source:http://linkedlifedata.com/resource/pubmed/id/20588921

Statements in which the resource exists as a subject.
PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
10
pubmed:dateCreated
2010-6-30
pubmed:abstractText
In the surface plasmon polaritons (SPPs) interference lithography, the scattering effect caused by the rough surface of silver film deteriorates the quality of lithography patterns. Research shows that under this condition the light field in the photoresist is not the results of SPPs interference but comes from the SPPs assisted imaging in which the scattered light propagates from the upper surface of the silver film to the photoresist. The near-field optical transfer function (NOTF) is used to study this process and a method of evaluating the imaging quality is presented. The validity of NOTF is verified by both SPPs assisted interference imaging experiments and simulations by the FDTD. It is also shown that the NOTF method is not only a convenient approach to describe the nano-scale information transmission in the near-field but also a good method to optimize experimental parameters.
pubmed:language
eng
pubmed:journal
pubmed:citationSubset
IM
pubmed:chemical
pubmed:status
MEDLINE
pubmed:month
May
pubmed:issn
1094-4087
pubmed:author
pubmed:copyrightInfo
(c) 2010 Optical Society of America.
pubmed:issnType
Electronic
pubmed:day
10
pubmed:volume
18
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
10685-93
pubmed:meshHeading
pubmed:year
2010
pubmed:articleTitle
Analysis of surface-plasmon-polaritons-assisted interference imaging by using silver film with rough surface.
pubmed:affiliation
Institute of Nanophotonics Technology, School of Physical Science and Technology, Sichuan University, Chengdu 610064, China.
pubmed:publicationType
Journal Article, Research Support, Non-U.S. Gov't