Linked Life Data

19687950

Source:http://linkedlifedata.com/resource/pubmed/id/19687950

Statements in which the resource exists as a subject.
PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
17
pubmed:dateCreated
2009-8-18
pubmed:abstractText
An accurate and simple optical triangulation method is proposed for determining the distance and the tilt angle between the window and the SQUID sensor in a scanning SQUID microscope (SSM) system. The surface of window near the sensor plane is roughened with Alumina powder so that the incident and reflected traces of the laser beam passing the window surface become visible and can be measured precisely with a normal optical microscope. Using the proposed approach, the distance between the sensor and the sample can be reproducibly adjusted to 30 microm or less. This method can also be applied to photolithography apparatus to detect the relative positions of the mask and the wafer.
pubmed:language
eng
pubmed:journal
pubmed:citationSubset
IM
pubmed:chemical
pubmed:status
MEDLINE
pubmed:month
Aug
pubmed:issn
1094-4087
pubmed:author
pubmed:copyrightInfo
(c) 2009 Optical Society of America
pubmed:issnType
Electronic
pubmed:day
17
pubmed:volume
17
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
14722-8
pubmed:meshHeading
pubmed:year
2009
pubmed:articleTitle
Monitoring and dynamic control of distance and tilt angle measurements in micro-alignment instrument using an imaging approach.
pubmed:affiliation
Institute of nanoscience, National Chung Hsing University, 407 Taichung, Taiwan. cjeng@phys.nchu.edu.tw
pubmed:publicationType
Journal Article, Research Support, Non-U.S. Gov't