Linked Life Data

19568665

Source:http://linkedlifedata.com/resource/pubmed/id/19568665

Statements in which the resource exists as a subject.
PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
14
pubmed:dateCreated
2009-7-1
pubmed:abstractText
A new method of anisotropic etching an amorphous bulk material is proposed in this paper. Laminar flow is employed in this method to mask the flow of an etchant and is termed as "liquid etch mask". Since this mask has the physical properties of a liquid, it brings several advantages that could not be achieved by any kind of other etch mask in the solid phase. As a consequence, the aspect ratio of the glass channel could be improved to approximately 1 while in an inexpensive and convenient manner.
pubmed:language
eng
pubmed:journal
pubmed:citationSubset
IM
pubmed:chemical
pubmed:status
MEDLINE
pubmed:month
Jul
pubmed:issn
1473-0197
pubmed:author
pubmed:issnType
Print
pubmed:day
21
pubmed:volume
9
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
1994-6
pubmed:meshHeading
pubmed:year
2009
pubmed:articleTitle
Laminar flow used as "liquid etch mask" in wet chemical etching to generate glass microstructures with an improved aspect ratio.
pubmed:affiliation
School of Pharmacy, East China University of Science and Technology, Shanghai, 200237, P. R. China.
pubmed:publicationType
Journal Article