Source:http://linkedlifedata.com/resource/pubmed/id/19405696
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Predicate | Object |
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rdf:type | |
lifeskim:mentions | |
pubmed:issue |
4
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pubmed:dateCreated |
2009-5-1
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pubmed:abstractText |
Tin oxide is a well known nonstoichiometric material with dual valency. The invariance of stoichiometry is very intriguing. As of today no report is available for preparing perfect stoichiometric tin oxide. Here we report a novel method to prepare stoichiometric tin oxide by modifying the known plasma enhanced chemical vapor deposition technique using SnCl(4)-xH(2)O as precursor and O(2) as reactant gas at various temperatures from 300 to 800 degrees C. Tetragonal rutile structure of SnO(2) was found, grown along the [110] direction. X-ray photoelectron spectroscopic measurement showed constant Sn/O ratio. Sn 3d and O 1s were found composed of only Sn(4+) (487.2 eV) and O-Sn(4+) (531.2 eV) with equal peak widths. Raman band intensity ( approximately 633 cm(-1)) was found increasing with temperature, indicating the morphological changes. Sheet resistance of approximately 0.5 kOmega/at 300 degrees C was measured that reduces to approximately 0.1 kOmega/at 600 degrees C. It is found that film stoichiometry remains unaltered, while the structural morphology changes significantly.
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pubmed:language |
eng
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pubmed:journal | |
pubmed:status |
PubMed-not-MEDLINE
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pubmed:month |
Apr
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pubmed:issn |
1089-7623
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pubmed:author | |
pubmed:issnType |
Electronic
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pubmed:volume |
80
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pubmed:owner |
NLM
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pubmed:authorsComplete |
Y
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pubmed:pagination |
045112
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pubmed:year |
2009
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pubmed:articleTitle |
A novel method for preparing stoichiometric SnO(2) thin films at low temperature.
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pubmed:affiliation |
School of Chemical Engineering, Chonbuk National University, Jeonju, Jeonbuk 561-756, South Korea.
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pubmed:publicationType |
Journal Article
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