Linked Life Data

19104598

Source:http://linkedlifedata.com/resource/pubmed/id/19104598

Statements in which the resource exists as a subject.
PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
26
pubmed:dateCreated
2008-12-23
pubmed:abstractText
We present a technological approach to the realization of channeled optical waveguides, starting from reactively sputtered tellurite glass thin films, grown on silica-coated 4" Si wafers. In particular, optical lithographic process and etching recipes have been developed to overcome the solubility of TeO(2) films in aqueous solutions, and to process them into high-index contrast structures with minimized post-etch roughness. Optical tests on preliminary rib waveguide geometries feature 6.3 dB/cm propagation loss for fundamental TE mode at lambda = 1.5 microm.
pubmed:language
eng
pubmed:journal
pubmed:status
PubMed-not-MEDLINE
pubmed:month
Dec
pubmed:issn
1094-4087
pubmed:author
pubmed:issnType
Electronic
pubmed:day
22
pubmed:volume
16
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
21662-70
pubmed:year
2008
pubmed:articleTitle
High-contrast waveguides in sputtered pure TeO2 glass thin films.
pubmed:affiliation
Corecom, Via Giuseppe Colombo 81, 20133 Milano, Italy. pietralunga@corecom.it
pubmed:publicationType
Journal Article