Statements in which the resource exists as a subject.
PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
11
pubmed:dateCreated
2007-11-30
pubmed:abstractText
Nano-stages are used in many ultra-precision systems, such as scanning probe microscope (SPM), optical fiber aligners, ultra-precision cutting, measuring and optical systems. Generally, ultra-precision machining and measuring are achieved using a nano-scale motion stage actuated using Piezo-electric actuators (PZT), and the importance of and demands for the motion stage increase with the need to improve system performance and accuracy. However, it is difficult to find solutions because the performance and characteristics of nano-scale motion stages are determined by various factors, such as the hinge structure, actuator, and method of system control. This paper focuses on improving of leafspring and planar joint hinges, and suggests a composite joint hinge stage.
pubmed:language
eng
pubmed:journal
pubmed:citationSubset
IM
pubmed:status
MEDLINE
pubmed:month
Nov
pubmed:issn
1533-4880
pubmed:author
pubmed:issnType
Print
pubmed:volume
7
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
4146-9
pubmed:meshHeading
pubmed:year
2007
pubmed:articleTitle
Behavior characteristics of nano-stage according to hinge structure.
pubmed:affiliation
Department of Mechanical and Precision Engineering, Pusan National University, Pusan 609-735, Korea.
pubmed:publicationType
Journal Article, Research Support, Non-U.S. Gov't, Evaluation Studies