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pubmed-article:17294484pubmed:abstractTextWe have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call "bond-detach lithography", was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bond-detach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive.lld:pubmed
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pubmed-article:17294484pubmed:dateRevised2008-11-21lld:pubmed
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pubmed-article:17294484pubmed:articleTitleBond-detach lithography: a method for micro/nanolithography by precision PDMS patterning.lld:pubmed
pubmed-article:17294484pubmed:affiliationMechanical Engineering Department, Northwestern University, Evanston, IL, USA.lld:pubmed
pubmed-article:17294484pubmed:publicationTypeJournal Articlelld:pubmed
pubmed-article:17294484pubmed:publicationTypeResearch Support, U.S. Gov't, Non-P.H.S.lld:pubmed
pubmed-article:17294484pubmed:publicationTypeResearch Support, N.I.H., Extramurallld:pubmed
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