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rdf:type |
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lifeskim:mentions |
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pubmed:issue |
1
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pubmed:dateCreated |
2007-2-12
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pubmed:abstractText |
We have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call "bond-detach lithography", was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bond-detach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive.
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pubmed:grant |
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pubmed:language |
eng
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pubmed:journal |
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pubmed:citationSubset |
IM
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pubmed:chemical |
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pubmed:status |
MEDLINE
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pubmed:month |
Jan
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pubmed:issn |
1613-6829
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pubmed:author |
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pubmed:issnType |
Electronic
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pubmed:volume |
3
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pubmed:owner |
NLM
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pubmed:authorsComplete |
Y
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pubmed:pagination |
132-8
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pubmed:dateRevised |
2008-11-21
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pubmed:meshHeading |
pubmed-meshheading:17294484-Chemical Phenomena,
pubmed-meshheading:17294484-Chemistry,
pubmed-meshheading:17294484-Crystallization,
pubmed-meshheading:17294484-Dimethylpolysiloxanes,
pubmed-meshheading:17294484-Gases,
pubmed-meshheading:17294484-Hot Temperature,
pubmed-meshheading:17294484-Macromolecular Substances,
pubmed-meshheading:17294484-Materials Testing,
pubmed-meshheading:17294484-Microchemistry,
pubmed-meshheading:17294484-Molecular Conformation,
pubmed-meshheading:17294484-Nanostructures,
pubmed-meshheading:17294484-Nanotechnology,
pubmed-meshheading:17294484-Nylons,
pubmed-meshheading:17294484-Particle Size,
pubmed-meshheading:17294484-Surface Properties
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pubmed:year |
2007
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pubmed:articleTitle |
Bond-detach lithography: a method for micro/nanolithography by precision PDMS patterning.
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pubmed:affiliation |
Mechanical Engineering Department, Northwestern University, Evanston, IL, USA.
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pubmed:publicationType |
Journal Article,
Research Support, U.S. Gov't, Non-P.H.S.,
Research Support, N.I.H., Extramural
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