Source:http://linkedlifedata.com/resource/pubmed/id/17068512
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Predicate | Object |
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rdf:type | |
lifeskim:mentions | |
pubmed:issue |
30
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pubmed:dateCreated |
2006-10-27
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pubmed:abstractText |
The ellipsometric measurement of thickness is demonstrated using a computer screen as a light source and a webcam as a detector, adding imaging off-null ellipsometry to the range of available computer screen photoassisted techniques. The results show good qualitative agreement with a simplified theoretical model and a thickness resolution in the nanometer range is achieved. The presented model can be used to optimize the setup for sensitivity. Since the computer screen serves as a homogeneous large area illumination source, which can be tuned to different intensities for different parts of the sample, a large sensitivity range can be obtained without sacrificing thickness resolution.
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pubmed:language |
eng
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pubmed:journal | |
pubmed:status |
PubMed-not-MEDLINE
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pubmed:month |
Oct
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pubmed:issn |
0003-6935
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pubmed:author | |
pubmed:issnType |
Print
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pubmed:day |
20
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pubmed:volume |
45
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pubmed:owner |
NLM
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pubmed:authorsComplete |
Y
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pubmed:pagination |
7795-9
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pubmed:year |
2006
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pubmed:articleTitle |
Computer screen photoassisted off-null ellipsometry.
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pubmed:affiliation |
Department of Physics, Chemistry and Biology, Linköping University, Linköping, Sweden. jimba@ifm.liu.se
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pubmed:publicationType |
Journal Article
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