Statements in which the resource exists as a subject.
PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
30
pubmed:dateCreated
2006-10-27
pubmed:abstractText
The ellipsometric measurement of thickness is demonstrated using a computer screen as a light source and a webcam as a detector, adding imaging off-null ellipsometry to the range of available computer screen photoassisted techniques. The results show good qualitative agreement with a simplified theoretical model and a thickness resolution in the nanometer range is achieved. The presented model can be used to optimize the setup for sensitivity. Since the computer screen serves as a homogeneous large area illumination source, which can be tuned to different intensities for different parts of the sample, a large sensitivity range can be obtained without sacrificing thickness resolution.
pubmed:language
eng
pubmed:journal
pubmed:status
PubMed-not-MEDLINE
pubmed:month
Oct
pubmed:issn
0003-6935
pubmed:author
pubmed:issnType
Print
pubmed:day
20
pubmed:volume
45
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
7795-9
pubmed:year
2006
pubmed:articleTitle
Computer screen photoassisted off-null ellipsometry.
pubmed:affiliation
Department of Physics, Chemistry and Biology, Linköping University, Linköping, Sweden. jimba@ifm.liu.se
pubmed:publicationType
Journal Article