| pubmed-article:17025145 | rdf:type | pubmed:Citation | lld:pubmed |
| pubmed-article:17025145 | lifeskim:mentions | umls-concept:C0596901 | lld:lifeskim |
| pubmed-article:17025145 | lifeskim:mentions | umls-concept:C1881977 | lld:lifeskim |
| pubmed-article:17025145 | lifeskim:mentions | umls-concept:C0074525 | lld:lifeskim |
| pubmed-article:17025145 | pubmed:issue | 7 | lld:pubmed |
| pubmed-article:17025145 | pubmed:dateCreated | 2006-10-9 | lld:pubmed |
| pubmed-article:17025145 | pubmed:abstractText | Textured alumina films have been used to fabricate nanoscale pores in Si3N4 membranes. A few nanometer-thick alumina layer was used as a masking material for nanopore fabrication, and the pattern was transferred into a 100-nm thick, 200 microm x 200 microm Si3N4 membrane by reactive ion etching (RIE). The nanopores were found to be concentrated in a approximately 150-microm diameter region at the center of the membrane. | lld:pubmed |
| pubmed-article:17025145 | pubmed:language | eng | lld:pubmed |
| pubmed-article:17025145 | pubmed:journal | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:17025145 | pubmed:citationSubset | IM | lld:pubmed |
| pubmed-article:17025145 | pubmed:chemical | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:17025145 | pubmed:chemical | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:17025145 | pubmed:chemical | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:17025145 | pubmed:chemical | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:17025145 | pubmed:status | MEDLINE | lld:pubmed |
| pubmed-article:17025145 | pubmed:month | Jul | lld:pubmed |
| pubmed-article:17025145 | pubmed:issn | 1533-4880 | lld:pubmed |
| pubmed-article:17025145 | pubmed:author | pubmed-author:RuoffRodney... | lld:pubmed |
| pubmed-article:17025145 | pubmed:author | pubmed-author:ZimneyEric... | lld:pubmed |
| pubmed-article:17025145 | pubmed:author | pubmed-author:ChenXinqiX | lld:pubmed |
| pubmed-article:17025145 | pubmed:author | pubmed-author:ChungtJae-Hyu... | lld:pubmed |
| pubmed-article:17025145 | pubmed:issnType | Print | lld:pubmed |
| pubmed-article:17025145 | pubmed:volume | 6 | lld:pubmed |
| pubmed-article:17025145 | pubmed:owner | NLM | lld:pubmed |
| pubmed-article:17025145 | pubmed:authorsComplete | Y | lld:pubmed |
| pubmed-article:17025145 | pubmed:pagination | 2175-81 | lld:pubmed |
| pubmed-article:17025145 | pubmed:meshHeading | pubmed-meshheading:17025145... | lld:pubmed |
| pubmed-article:17025145 | pubmed:meshHeading | pubmed-meshheading:17025145... | lld:pubmed |
| pubmed-article:17025145 | pubmed:meshHeading | pubmed-meshheading:17025145... | lld:pubmed |
| pubmed-article:17025145 | pubmed:meshHeading | pubmed-meshheading:17025145... | lld:pubmed |
| pubmed-article:17025145 | pubmed:meshHeading | pubmed-meshheading:17025145... | lld:pubmed |
| pubmed-article:17025145 | pubmed:meshHeading | pubmed-meshheading:17025145... | lld:pubmed |
| pubmed-article:17025145 | pubmed:meshHeading | pubmed-meshheading:17025145... | lld:pubmed |
| pubmed-article:17025145 | pubmed:meshHeading | pubmed-meshheading:17025145... | lld:pubmed |
| pubmed-article:17025145 | pubmed:meshHeading | pubmed-meshheading:17025145... | lld:pubmed |
| pubmed-article:17025145 | pubmed:meshHeading | pubmed-meshheading:17025145... | lld:pubmed |
| pubmed-article:17025145 | pubmed:meshHeading | pubmed-meshheading:17025145... | lld:pubmed |
| pubmed-article:17025145 | pubmed:meshHeading | pubmed-meshheading:17025145... | lld:pubmed |
| pubmed-article:17025145 | pubmed:year | 2006 | lld:pubmed |
| pubmed-article:17025145 | pubmed:articleTitle | Fabrication of nanopores in a 100-nm thick Si3N4 membrane. | lld:pubmed |
| pubmed-article:17025145 | pubmed:affiliation | Department of Mechanical Engineering, Northwestern University, Evanston, IL 60208, USA. | lld:pubmed |
| pubmed-article:17025145 | pubmed:publicationType | Journal Article | lld:pubmed |
| pubmed-article:17025145 | pubmed:publicationType | Research Support, U.S. Gov't, Non-P.H.S. | lld:pubmed |
| pubmed-article:17025145 | pubmed:publicationType | Research Support, Non-U.S. Gov't | lld:pubmed |
