Source:http://linkedlifedata.com/resource/pubmed/id/15765696
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| Predicate | Object |
|---|---|
| rdf:type | |
| lifeskim:mentions | |
| pubmed:issue |
7
|
| pubmed:dateCreated |
2005-3-15
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| pubmed:abstractText |
A 3 x 3 micromirror array has been designed and successfully fabricated by multilayer silicon surface micromaching technology. It is composed of a bottom electrode, a supporting part, and a mirror plate and can modulate both phase and amplitude of incident light. The maximum deflection length along the vertical direction of the mirror plate is 2 microm, and the rotation angles about the Y and X axes are +/-2.3 degrees and +/-1.45 degrees, respectively; one can obtain an even larger deflection by simply increasing the thickness of the sacrificial layers.
|
| pubmed:language |
eng
|
| pubmed:journal | |
| pubmed:status |
PubMed-not-MEDLINE
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| pubmed:month |
Mar
|
| pubmed:issn |
0003-6935
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| pubmed:author | |
| pubmed:issnType |
Print
|
| pubmed:day |
1
|
| pubmed:volume |
44
|
| pubmed:owner |
NLM
|
| pubmed:authorsComplete |
Y
|
| pubmed:pagination |
1178-81
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| pubmed:year |
2005
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| pubmed:articleTitle |
Versatile micromirror with a multimovement mode.
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| pubmed:affiliation |
Department of Optoelectronics Engineering, Huazhong University of Science and Technology, Wuhan 430074, China. yhb_hust@yahoo.com
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| pubmed:publicationType |
Journal Article
|