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PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
1
pubmed:dateCreated
2005-1-14
pubmed:abstractText
We report high-resolution subsurface imaging of a silicon flip chip by detection of the photocurrent generated by the two-photon absorption of 1530-nm light from a femtosecond Er:fiber laser. The technique combines the focal sensitivity of two-photon excitation with the enhanced optical resolution of high-numerical-aperture solid-immersion imaging. Features on a sub-1-microm scale are clearly resolvable with high contrast, showing a resolution of 325 nm.
pubmed:language
eng
pubmed:journal
pubmed:status
PubMed-not-MEDLINE
pubmed:month
Jan
pubmed:issn
0146-9592
pubmed:author
pubmed:issnType
Print
pubmed:day
1
pubmed:volume
30
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
26-8
pubmed:year
2005
pubmed:articleTitle
Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm.
pubmed:affiliation
Ultrafast Optics Group, School of Engineering and Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, UK. e.ramsay@hw.ac.uk
pubmed:publicationType
Journal Article