Source:http://linkedlifedata.com/resource/pubmed/id/15648626
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Predicate | Object |
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rdf:type | |
lifeskim:mentions | |
pubmed:issue |
1
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pubmed:dateCreated |
2005-1-14
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pubmed:abstractText |
We report high-resolution subsurface imaging of a silicon flip chip by detection of the photocurrent generated by the two-photon absorption of 1530-nm light from a femtosecond Er:fiber laser. The technique combines the focal sensitivity of two-photon excitation with the enhanced optical resolution of high-numerical-aperture solid-immersion imaging. Features on a sub-1-microm scale are clearly resolvable with high contrast, showing a resolution of 325 nm.
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pubmed:language |
eng
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pubmed:journal | |
pubmed:status |
PubMed-not-MEDLINE
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pubmed:month |
Jan
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pubmed:issn |
0146-9592
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pubmed:author | |
pubmed:issnType |
Print
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pubmed:day |
1
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pubmed:volume |
30
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pubmed:owner |
NLM
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pubmed:authorsComplete |
Y
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pubmed:pagination |
26-8
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pubmed:year |
2005
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pubmed:articleTitle |
Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm.
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pubmed:affiliation |
Ultrafast Optics Group, School of Engineering and Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, UK. e.ramsay@hw.ac.uk
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pubmed:publicationType |
Journal Article
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