Source:http://linkedlifedata.com/resource/pubmed/id/14961115
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rdf:type | |
lifeskim:mentions | |
pubmed:issue |
6975
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pubmed:dateCreated |
2004-2-12
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pubmed:abstractText |
Silicon has long been the optimal material for electronics, but it is only relatively recently that it has been considered as a material option for photonics. One of the key limitations for using silicon as a photonic material has been the relatively low speed of silicon optical modulators compared to those fabricated from III-V semiconductor compounds and/or electro-optic materials such as lithium niobate. To date, the fastest silicon-waveguide-based optical modulator that has been demonstrated experimentally has a modulation frequency of only approximately 20 MHz (refs 10, 11), although it has been predicted theoretically that a approximately 1-GHz modulation frequency might be achievable in some device structures. Here we describe an approach based on a metal-oxide-semiconductor (MOS) capacitor structure embedded in a silicon waveguide that can produce high-speed optical phase modulation: we demonstrate an all-silicon optical modulator with a modulation bandwidth exceeding 1 GHz. As this technology is compatible with conventional complementary MOS (CMOS) processing, monolithic integration of the silicon modulator with advanced electronics on a single silicon substrate becomes possible.
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pubmed:commentsCorrections | |
pubmed:language |
eng
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pubmed:journal | |
pubmed:status |
PubMed-not-MEDLINE
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pubmed:month |
Feb
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pubmed:issn |
1476-4687
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pubmed:author | |
pubmed:issnType |
Electronic
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pubmed:day |
12
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pubmed:volume |
427
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pubmed:owner |
NLM
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pubmed:authorsComplete |
Y
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pubmed:pagination |
615-8
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pubmed:year |
2004
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pubmed:articleTitle |
A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor.
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pubmed:affiliation |
Intel Corporation, 2200 Mission College Blvd, CHP3-109, Santa Clara, California 95054, USA. ansheng.liu@intel.com
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pubmed:publicationType |
Journal Article
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