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pubmed-article:21369011rdf:typepubmed:Citationlld:pubmed
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pubmed-article:21369011pubmed:dateCreated2011-3-3lld:pubmed
pubmed-article:21369011pubmed:abstractTextWe designed, fabricated and characterized a nano-periodical highly-efficient blazed grating for extreme-ultraviolet (XUV) radiation. The grating was optimized by the rigorous coupled-wave analysis method (RCWA) and milled into the top layer of a highly-reflective mirror for IR light. The XUV diffraction efficiency was determined to be around 20% in the range from 35.5 to 79.2 nm. The effects of the nanograting on the reflectivity of the IR light and non-linear effects introduced by the nanograting have been measured and are discussed.lld:pubmed
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pubmed-article:21369011pubmed:authorpubmed-author:YangYing-Ying...lld:pubmed
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pubmed-article:21369011pubmed:year2011lld:pubmed
pubmed-article:21369011pubmed:articleTitleOptimization and characterization of a highly-efficient diffraction nanograting for MHz XUV pulses.lld:pubmed
pubmed-article:21369011pubmed:affiliationMax-Planck-Institut für Quantenoptik, Hans-Kopfermann-Straße 1, 85748 Garching, Germany.lld:pubmed
pubmed-article:21369011pubmed:publicationTypeJournal Articlelld:pubmed
pubmed-article:21369011pubmed:publicationTypeResearch Support, Non-U.S. Gov'tlld:pubmed