| pubmed-article:21098946 | rdf:type | pubmed:Citation | lld:pubmed |
| pubmed-article:21098946 | lifeskim:mentions | umls-concept:C0018270 | lld:lifeskim |
| pubmed-article:21098946 | lifeskim:mentions | umls-concept:C1138408 | lld:lifeskim |
| pubmed-article:21098946 | lifeskim:mentions | umls-concept:C1706765 | lld:lifeskim |
| pubmed-article:21098946 | pubmed:issue | 50 | lld:pubmed |
| pubmed-article:21098946 | pubmed:dateCreated | 2010-11-26 | lld:pubmed |
| pubmed-article:21098946 | pubmed:abstractText | We report the low-temperature growth of vertically aligned carbon nanotubes (CNTs) at high growth rates by a photo-thermal chemical vapour deposition (PTCVD) technique using a Ti/Fe bilayer film as the catalyst. The bulk growth temperature of the substrate is as low as 370?°C and the growth rate is up to 1.3 µm min(-1), at least eight times faster than the values reported by traditional thermal CVD methods. Transmission electron microscopy observations reveal that as-grown CNTs are uniformly made of highly crystalline 5-6 graphene shells with an approximately 10 nm outer diameter and a 5-6 nm inner diameter. The low-temperature rapid growth of CNTs is strongly related to the unique top-down heating mode of PTCVD and the use of a Ti/Fe bimetallic solid solution catalyst. The present study will advance the development of CNTs as interconnects in nanoelectronics, through a CMOS-compatible low-temperature deposition method suitable for back-end-of-line processes. | lld:pubmed |
| pubmed-article:21098946 | pubmed:commentsCorrections | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:21098946 | pubmed:language | eng | lld:pubmed |
| pubmed-article:21098946 | pubmed:journal | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:21098946 | pubmed:status | PubMed-not-MEDLINE | lld:pubmed |
| pubmed-article:21098946 | pubmed:month | Dec | lld:pubmed |
| pubmed-article:21098946 | pubmed:issn | 1361-6528 | lld:pubmed |
| pubmed-article:21098946 | pubmed:author | pubmed-author:ShenkJ SJS | lld:pubmed |
| pubmed-article:21098946 | pubmed:author | pubmed-author:TaoY XYX | lld:pubmed |
| pubmed-article:21098946 | pubmed:author | pubmed-author:Papakonstanti... | lld:pubmed |
| pubmed-article:21098946 | pubmed:author | pubmed-author:SilvaS R PSR | lld:pubmed |
| pubmed-article:21098946 | pubmed:author | pubmed-author:StolojanVV | lld:pubmed |
| pubmed-article:21098946 | pubmed:issnType | Electronic | lld:pubmed |
| pubmed-article:21098946 | pubmed:day | 17 | lld:pubmed |
| pubmed-article:21098946 | pubmed:volume | 21 | lld:pubmed |
| pubmed-article:21098946 | pubmed:owner | NLM | lld:pubmed |
| pubmed-article:21098946 | pubmed:authorsComplete | Y | lld:pubmed |
| pubmed-article:21098946 | pubmed:pagination | 505604 | lld:pubmed |
| pubmed-article:21098946 | pubmed:year | 2010 | lld:pubmed |
| pubmed-article:21098946 | pubmed:articleTitle | High-rate low-temperature growth of vertically aligned carbon nanotubes. | lld:pubmed |
| pubmed-article:21098946 | pubmed:affiliation | Nano-Electronics Centre, Advanced Technology Institute, University of Surrey, Guildford, Surrey GU2 7XH, UK. ngshang@hotmail.com [corrected] | lld:pubmed |
| pubmed-article:21098946 | pubmed:publicationType | Journal Article | lld:pubmed |
| pubmed-article:21098946 | pubmed:publicationType | Research Support, Non-U.S. Gov't | lld:pubmed |
