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pubmed-article:19420525rdf:typepubmed:Citationlld:pubmed
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pubmed-article:19420525pubmed:issue14lld:pubmed
pubmed-article:19420525pubmed:dateCreated2009-5-7lld:pubmed
pubmed-article:19420525pubmed:abstractTextDiamond-like carbon (DLC) films, used as molds for nanoimprint lithography, were treated with a fluorocarbon-based plasma in order to enhance their anti-adhesion properties. While ellipsometry and atomic force microscope measurements showed negligible changes in thickness and surface roughness after plasma processing, contact angle measurement found fluorine plasma-treated DLC surfaces to be highly hydrophobic, with surface energy values reduced from approximately 45 mJ m(-2) for untreated films to approximately 20-30 mJ m(-2) after fluorination. X-ray photoelectron spectroscopy revealed a thin (from approximately 0.5 to approximately 3 nm) fluorocarbon layer on the DLC surface. Proposed mechanisms for the formation of this layer include two competing processes: etching of DLC and deposition of fluorocarbon material, with one or the other mechanism dominant, depending on the plasma conditions. Fluorocarbon plasma-treated DLC molds for nanoimprint lithography were used to pattern sub-20 nm size features with a high degree of repeatability, demonstrating an extended lifetime of the anti-adhesion coating.lld:pubmed
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pubmed-article:19420525pubmed:languageenglld:pubmed
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pubmed-article:19420525pubmed:statusPubMed-not-MEDLINElld:pubmed
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pubmed-article:19420525pubmed:issn1361-6528lld:pubmed
pubmed-article:19420525pubmed:authorpubmed-author:WoolM SMSlld:pubmed
pubmed-article:19420525pubmed:authorpubmed-author:SchvartzmanMMlld:pubmed
pubmed-article:19420525pubmed:issnTypeElectroniclld:pubmed
pubmed-article:19420525pubmed:day8lld:pubmed
pubmed-article:19420525pubmed:volume20lld:pubmed
pubmed-article:19420525pubmed:ownerNLMlld:pubmed
pubmed-article:19420525pubmed:authorsCompleteYlld:pubmed
pubmed-article:19420525pubmed:pagination145306lld:pubmed
pubmed-article:19420525pubmed:dateRevised2011-9-26lld:pubmed
pubmed-article:19420525pubmed:year2009lld:pubmed
pubmed-article:19420525pubmed:articleTitlePlasma fluorination of diamond-like carbon surfaces: mechanism and application to nanoimprint lithography.lld:pubmed
pubmed-article:19420525pubmed:affiliationDepartment of Chemical Engineering, Columbia University, New York, NY 10027, USA.lld:pubmed
pubmed-article:19420525pubmed:publicationTypeJournal Articlelld:pubmed
pubmed-article:19420525pubmed:publicationTypeResearch Support, U.S. Gov't, Non-P.H.S.lld:pubmed
pubmed-article:19420525pubmed:publicationTypeResearch Support, N.I.H., Extramurallld:pubmed