| pubmed-article:18623293 | rdf:type | pubmed:Citation | lld:pubmed |
| pubmed-article:18623293 | lifeskim:mentions | umls-concept:C0934502 | lld:lifeskim |
| pubmed-article:18623293 | lifeskim:mentions | umls-concept:C1881977 | lld:lifeskim |
| pubmed-article:18623293 | lifeskim:mentions | umls-concept:C0002374 | lld:lifeskim |
| pubmed-article:18623293 | lifeskim:mentions | umls-concept:C0678594 | lld:lifeskim |
| pubmed-article:18623293 | lifeskim:mentions | umls-concept:C1257851 | lld:lifeskim |
| pubmed-article:18623293 | lifeskim:mentions | umls-concept:C0205431 | lld:lifeskim |
| pubmed-article:18623293 | pubmed:issue | 8 | lld:pubmed |
| pubmed-article:18623293 | pubmed:dateCreated | 2008-8-7 | lld:pubmed |
| pubmed-article:18623293 | pubmed:abstractText | Nanotubes are fabricated by atomic layer deposition (ALD) into nanopore arrays created by anodic aluminum oxide (AAO). A transmission electron microscopy (TEM) methodology is developed and applied to quantify the ALD conformality in the nanopores (thickness as a function of depth), and the results are compared to existing models for ALD conformality. ALD HfO2 nanotubes formed in AAO templates are released by dissolution of the Al2O3, transferred to a grid, and imaged by TEM. An algorithm is devised to automate the quantification of nanotube wall thickness as a function of position along the central axis of the nanotube, by using a cylindrical model for the nanotube. Diffusion-limited depletion occurs in the lower portion of the nanotubes and is characterized by a linear slope of decreasing thickness. Experimentally recorded slopes match well with two simple models of ALD within nanopores presented in the literature. The TEM analysis technique provides a method for the rapid analysis of such nanostructures in general, and is also a means to efficiently quantify ALD profiles in nanostructures for a variety of nanodevice applications. | lld:pubmed |
| pubmed-article:18623293 | pubmed:language | eng | lld:pubmed |
| pubmed-article:18623293 | pubmed:journal | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:18623293 | pubmed:citationSubset | IM | lld:pubmed |
| pubmed-article:18623293 | pubmed:chemical | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:18623293 | pubmed:chemical | http://linkedlifedata.com/r... | lld:pubmed |
| pubmed-article:18623293 | pubmed:status | MEDLINE | lld:pubmed |
| pubmed-article:18623293 | pubmed:month | Aug | lld:pubmed |
| pubmed-article:18623293 | pubmed:issn | 1613-6829 | lld:pubmed |
| pubmed-article:18623293 | pubmed:author | pubmed-author:LeeSang BokSB | lld:pubmed |
| pubmed-article:18623293 | pubmed:author | pubmed-author:SonSang JunSJ | lld:pubmed |
| pubmed-article:18623293 | pubmed:author | pubmed-author:RubloffGary... | lld:pubmed |
| pubmed-article:18623293 | pubmed:author | pubmed-author:PerezIsraelI | lld:pubmed |
| pubmed-article:18623293 | pubmed:author | pubmed-author:RobertsonErin... | lld:pubmed |
| pubmed-article:18623293 | pubmed:author | pubmed-author:BanerjeeParag... | lld:pubmed |
| pubmed-article:18623293 | pubmed:author | pubmed-author:Henn-Lecordie... | lld:pubmed |
| pubmed-article:18623293 | pubmed:issnType | Electronic | lld:pubmed |
| pubmed-article:18623293 | pubmed:volume | 4 | lld:pubmed |
| pubmed-article:18623293 | pubmed:owner | NLM | lld:pubmed |
| pubmed-article:18623293 | pubmed:authorsComplete | Y | lld:pubmed |
| pubmed-article:18623293 | pubmed:pagination | 1223-32 | lld:pubmed |
| pubmed-article:18623293 | pubmed:meshHeading | pubmed-meshheading:18623293... | lld:pubmed |
| pubmed-article:18623293 | pubmed:meshHeading | pubmed-meshheading:18623293... | lld:pubmed |
| pubmed-article:18623293 | pubmed:meshHeading | pubmed-meshheading:18623293... | lld:pubmed |
| pubmed-article:18623293 | pubmed:meshHeading | pubmed-meshheading:18623293... | lld:pubmed |
| pubmed-article:18623293 | pubmed:meshHeading | pubmed-meshheading:18623293... | lld:pubmed |
| pubmed-article:18623293 | pubmed:year | 2008 | lld:pubmed |
| pubmed-article:18623293 | pubmed:articleTitle | TEM-based metrology for HfO2 layers and nanotubes formed in anodic aluminum oxide nanopore structures. | lld:pubmed |
| pubmed-article:18623293 | pubmed:affiliation | Department of Materials Science and Engineering and Institute for Systems Research, University of Maryland, 2145 A. V. Williams Building, College Park, MD 20742-3285, USA. | lld:pubmed |
| pubmed-article:18623293 | pubmed:publicationType | Journal Article | lld:pubmed |
| pubmed-article:18623293 | pubmed:publicationType | Research Support, U.S. Gov't, Non-P.H.S. | lld:pubmed |
