The chemical reactions and pathways resulting in the formation of 1-deoxy-D-xylulose 5-phosphate, the 5-phospho derivative of 1-deoxy-D-xylulose. 1-deoxy-D-xylulose 5-phosphate is an intermediate in the non-mevalonate pathway and a common precursor for isoprenoid, thiamin, and pyridoxol biosynthesis.