SPARQL
- Query
- Update
Search
RelFinder
About
Sources
Admin

Low damage atomic layer etching of ZrO2 by using BCl3 gas and ar neutral beam.

Source:http://linkedlifedata.com/resource/pubmed/id/19908792

Download in:

JSON
RDF
N3/Turtle
N-Triples

View as

Triples

General Info

PMID
19908792

Disclaimer: Part of the information in the Linked Life Data knowledge base is from copyrighted data sources.
Linked Life Data is a demonstration service and its users are solely responsible for compliance with any copyright restrictions.
Report a copyright violation.
© 2009-2012 Ontotext AD. All rights reserved.

Build Timestamp: 2013-05-09 12:03:49
Build Revision: 3774