Statements in which the resource exists as a subject.
PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
1
pubmed:dateCreated
2004-1-19
pubmed:abstractText
Light profile microscopy (LPM) is a recently developed technique of optical inspection that is used to record micrometer scale images of thin film cross-sections on a direct basis. This technique uses a novel right-angle imaging geometry that shows outstanding contrast for subtle interface structures and morphologies that are invisible to conventional methods of inspection. When laser sources are used for sample illumination, image contrast is provided by luminescence and elastic and/or inelastic scatter. When a white-light excitation source is used for LPM, primary contrast is obtained from elastic scatter, while secondary contrast results from refraction, secondary transmission, and secondary reflection from material phases. We term this mode of inspection broadband light profile microscopy (BB-LPM). It is implemented with a compact, easily aligned apparatus and minimal sample preparation, and it shows outstanding interface contrast similar to laser LPM. In this work we demonstrate BB-LPM as a method for direct imaging of the layers structures of a variety of thin film samples of industrial and manufacturing interest.
pubmed:language
eng
pubmed:journal
pubmed:citationSubset
IM
pubmed:status
MEDLINE
pubmed:month
Jan
pubmed:issn
0003-7028
pubmed:author
pubmed:issnType
Print
pubmed:volume
58
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
96-104
pubmed:dateRevised
2006-11-15
pubmed:meshHeading
pubmed:year
2004
pubmed:articleTitle
Broadband light profile microscopy: a rapid and direct method for thin film depth imaging.
pubmed:affiliation
Department of Chemistry, McGill University, 801 Sherbrooke St. W., Montreal, Qc, H3A 2K6 Canada.
pubmed:publicationType
Journal Article, Research Support, Non-U.S. Gov't, Evaluation Studies