Linked Life Data

19441371

Source:http://linkedlifedata.com/resource/pubmed/id/19441371

Statements in which the resource exists as a subject.
PredicateObject
rdf:type
lifeskim:mentions
pubmed:issue
2
pubmed:dateCreated
2009-5-15
pubmed:abstractText
Deformation of a LCD glass-panel during the alignment is analyzed for a UV-nanoimprint lithography process. In UV-nanoimprint processes for manufacturing LCD panels, a glass-panel should be aligned with respect to the position of fiducial marks on imprint mold and the target glass. The alignment process will place the nano-patterns on the mold into the designated position in the glass-panel. Usually, viscoelastic resin is laminated between the mold and glass-panel. The resin is solidified by ultra-violet light and is designed to be nano-patterns. Thus, shear force would be induced on the panel during alignment process. The shear force can cause deformation of glass-panel, which ultimately causes misalignment of nano-patterns. Thus, deformation analysis for the glass-panel in the alignment process is essential to enhance the accuracy and to reduce alignment cost in nano-imprint. In this work, deformation of the glass panel from the viscous force is calculated by using 'ALGOR' package. The mechanism of misalignment of nano-patterns due to the deformation is analyzed. Finally, the effect of misalignment is discussed, and the experimental results are also presented.
pubmed:language
eng
pubmed:journal
pubmed:status
PubMed-not-MEDLINE
pubmed:month
Feb
pubmed:issn
1533-4880
pubmed:author
pubmed:issnType
Print
pubmed:volume
9
pubmed:owner
NLM
pubmed:authorsComplete
Y
pubmed:pagination
684-7
pubmed:year
2009
pubmed:articleTitle
Deformation of a LCD glass-panel by alignment process in nanoimprint lithography.
pubmed:affiliation
Graduate School of Mechanical Design, Kookmin University, Seoul 136-702, Korea.
pubmed:publicationType
Journal Article